MV Products has introduced a full line of vacuum inlet traps and filter media for protecting vacuum pumps employed in research and production atomic layer deposition (ALD) processes.
MV vacuum inlet traps for ALD processes range from 4" to 16" in diameter with port sizes from NW-25 to ISO-160 for protecting vacuum pumps in applications with vacuum flow rates from 25 to 2000cfm.
Featuring interchangeable filter elements, the stainless steel traps can be customised by users to remove all ALD process by-products from precursors such as TMA, TiCl, DeZ, and H2S, including particulates and unreacted precursors.
Suited for the ALD manufacturing of ICs, MEMS, LEDs and OLEDs, optics and displays, batteries, and more, MV vacuum inlet traps include the PosiTrap and Multi-Trap product lines.
Interchangeable filter elements include stainless steel gauze for particle filtration, activated charcoal for unreacted precursor adsorption, Sodasorb for acid neutralisation, and Sulfatreat for H2S neutralisation.
MV Products is a division of Massachusetts, US-based Mass-Vac, which specialises in solving process contamination problems associated with vacuum systems.