Atlas Copco has completed the acquisition of Brooks’ Semiconductor Cryogenics Business, which was announced in August 2018.
The acquisition includes cryogenic pump operations in Chelmsford, US and Monterrey, Mexico, as well as a global sales and service network and Brooks Automation’s 50% share of Ulvac Cryogenics.
The cryogenic business employs approximately 400 staff members and is a market leader in advanced cryogenic pumps and cryogenic chillers for the semiconductor and related businesses.
Product lines include CTI-Cryogenics and Polycold.
According to Atlas Copco, the acquisition will expand the company’s technology offering to customers in the semiconductor and general vacuum industries through Atlas Copco’s Edwards brand.
Additionally, it complements the company’s existing portfolio with a new range of high vacuum pumps that optimise the removal of water vapour and hydrogen.
Atlas Copco will create a new division in the Vacuum Technique Business Area to increase the focus on expanding the company’s chamber solutions offering to customers.
Headquartered in Chelmsford, US, the new division will be known as Semiconductor Chamber Solutions.