Semi-Gas unveils new ultra-high purity liquid push system for specialty fluids
Semi-Gas, a division of Applied Energy Systems, has introduced the Xturion liquid push delivery system (LPX) for the precise delivery and handling of ultra-high purity liquids.
The fully automatic system, operated by a GigaGuard PLC controller, features a 9” colour touchscreen and user-definable alarms and set points.
The system’s liquid-tight, ducted enclosure includes a high flow manifold design with ½” inch stainless steel components.
LPX delivers ultra-high purity liquids using an inert push gas, which doubles to support the system’s automatic purge processes.
Built in accordance with SEMI-S2 standards and helium leak tested to 1.0 x 10-8Atm-cc/sec, the liquid push system is also equipped with a number of safety features including vent line liquid leak sensors, an emergency off button, and remote monitoring and shutdown functionality.
The system also features an enclosure that accommodates up to 200l (24” x 48”) drums or tanks, and that includes a liquid level detector and an 8” exhaust connection.
A Thermal Instruments mass flowmeter is integrated into the system for high-precision measurement of the liquid flow rate.
The Xturion is flexible in system configuration and flow capacity for optional wall mount and/or rack mount applications, as well as standard and higher volume applications.
Jim Murphy, general manager of Applied Energy Systems, says: ‘While this system was initially developed to suit a specific need presented by a specific customer, we see the applicability of such a product in many other industry processes and production environments that use ultra-high purity liquids.’